JPH0574180B2 - - Google Patents

Info

Publication number
JPH0574180B2
JPH0574180B2 JP62103025A JP10302587A JPH0574180B2 JP H0574180 B2 JPH0574180 B2 JP H0574180B2 JP 62103025 A JP62103025 A JP 62103025A JP 10302587 A JP10302587 A JP 10302587A JP H0574180 B2 JPH0574180 B2 JP H0574180B2
Authority
JP
Japan
Prior art keywords
electron beam
source
substrate
electrons
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62103025A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63269445A (ja
Inventor
Masahiko Okunuki
Mitsuaki Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62103025A priority Critical patent/JPS63269445A/ja
Priority to US07/186,966 priority patent/US4896045A/en
Priority to EP88303780A priority patent/EP0289277B1/en
Priority to DE3850441T priority patent/DE3850441T2/de
Publication of JPS63269445A publication Critical patent/JPS63269445A/ja
Publication of JPH0574180B2 publication Critical patent/JPH0574180B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP62103025A 1987-04-28 1987-04-28 電子ビーム発生素子 Granted JPS63269445A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62103025A JPS63269445A (ja) 1987-04-28 1987-04-28 電子ビーム発生素子
US07/186,966 US4896045A (en) 1987-04-28 1988-04-27 Electron beam head and patterning apparatus including detection of secondary or reflected electrons
EP88303780A EP0289277B1 (en) 1987-04-28 1988-04-27 An electron beam head
DE3850441T DE3850441T2 (de) 1987-04-28 1988-04-27 Elektronenstrahlkopf.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62103025A JPS63269445A (ja) 1987-04-28 1987-04-28 電子ビーム発生素子

Publications (2)

Publication Number Publication Date
JPS63269445A JPS63269445A (ja) 1988-11-07
JPH0574180B2 true JPH0574180B2 (en]) 1993-10-15

Family

ID=14343104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62103025A Granted JPS63269445A (ja) 1987-04-28 1987-04-28 電子ビーム発生素子

Country Status (4)

Country Link
US (1) US4896045A (en])
EP (1) EP0289277B1 (en])
JP (1) JPS63269445A (en])
DE (1) DE3850441T2 (en])

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0256641B1 (en) * 1986-06-23 1993-12-01 Canon Kabushiki Kaisha Method and apparatus for transferring information by utilizing electron beam
JPH02231708A (ja) * 1989-03-06 1990-09-13 Fujitsu Ltd 半導体装置の位置合わせマーク検出方法及び装置
EP0416625B1 (en) * 1989-09-07 1996-03-13 Canon Kabushiki Kaisha Electron emitting device, method for producing the same, and display apparatus and electron scribing apparatus utilizing same.
US5681956A (en) * 1990-12-28 1997-10-28 Neurogen Corporation 4-aryl substituted piperazinylmethyl phenylimidazole derivatives; a new class of dopamine receptor subtype specific ligands
US5633377A (en) * 1990-12-28 1997-05-27 Neurogen Corporation 4-piperidino- and piperazinomethyl-2-cyclohexyl imidazole derivatives; dopamine receptor subtype specific ligands
DE69223088T2 (de) * 1991-06-10 1998-03-05 Fujitsu Ltd Apparat zur Musterüberprüfung und Elektronenstrahlgerät
US5557105A (en) * 1991-06-10 1996-09-17 Fujitsu Limited Pattern inspection apparatus and electron beam apparatus
US5384463A (en) * 1991-06-10 1995-01-24 Fujisu Limited Pattern inspection apparatus and electron beam apparatus
US5122663A (en) * 1991-07-24 1992-06-16 International Business Machine Corporation Compact, integrated electron beam imaging system
US5644132A (en) * 1994-06-20 1997-07-01 Opan Technologies Ltd. System for high resolution imaging and measurement of topographic and material features on a specimen
US5536940A (en) * 1995-02-27 1996-07-16 Advanced Micro Devices, Inc. Energy filtering for electron back-scattered diffraction patterns
JP3666951B2 (ja) * 1995-10-06 2005-06-29 キヤノン株式会社 マーク検出方法、これを用いた位置合わせ方法、露光方法及び装置、ならびにデバイス生産方法
JPH10294255A (ja) * 1997-04-17 1998-11-04 Canon Inc 電子ビーム照明装置、および該電子ビーム照明装置を備えた露光装置
US6504393B1 (en) 1997-07-15 2003-01-07 Applied Materials, Inc. Methods and apparatus for testing semiconductor and integrated circuit structures
US6252412B1 (en) 1999-01-08 2001-06-26 Schlumberger Technologies, Inc. Method of detecting defects in patterned substrates
JP2001015421A (ja) 1999-07-01 2001-01-19 Canon Inc データ作成方法およびそれを用いた荷電粒子ビーム描画装置
US7528614B2 (en) * 2004-12-22 2009-05-05 Applied Materials, Inc. Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam
JP4113032B2 (ja) * 2003-04-21 2008-07-02 キヤノン株式会社 電子銃及び電子ビーム露光装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL184549C (nl) * 1978-01-27 1989-08-16 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenstroom en weergeefinrichting voorzien van een dergelijke halfgeleiderinrichting.
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US4596929A (en) * 1983-11-21 1986-06-24 Nanometrics Incorporated Three-stage secondary emission electron detection in electron microscopes
GB8514390D0 (en) * 1985-06-07 1985-07-10 Turner D W Electron lithography
JPS62155517A (ja) * 1985-12-27 1987-07-10 Canon Inc パターン描画装置及び方法

Also Published As

Publication number Publication date
EP0289277A2 (en) 1988-11-02
EP0289277B1 (en) 1994-06-29
DE3850441T2 (de) 1994-11-17
US4896045A (en) 1990-01-23
EP0289277A3 (en) 1990-03-21
JPS63269445A (ja) 1988-11-07
DE3850441D1 (de) 1994-08-04

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